A User's Guide to Vacuum Technology

In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.

Customer Reviews:

everyone in semiconductor industrie must read this book

By Andreas Berthe "techbook" - September 3, 2005

Since I work in a very big semi' fab as field service engineer I looking for a good description of any tool part's on several manufacturing machines. But i work in Germany and it isn't so easy to find much more and better information as for an student without experience. It is my second book about vakuum technologie, all new kinds of engineering and also standard technologie is well prepaired in this issue. Some description of Pump's could be better or more funktionplan's , but all in one book is maybe too much. I was very surprised of this universal Handbook for engineer's and technician, best offer for all who need information about PVD, CVD, Implant vakuum etc. A lot of basic's in introduction part, well to understand, intresting gas properties, cluster technologie and last but not least - a big appendix with all what you need , very fine. Thank's for this good book.

Execellent, practical and comprehensive reference book.

By A Customer - May 16, 1997

I borrowed this book from a colleague here at Applied Materials. After looking at it for a few minutes, I offered to buy it from him. Of course, he refused. So here I am at Amazon (physically at work) to purchase the book. It is extremely practical and I intend to keep it here at work as a reference for problems I encounter. By the way, my web address is http://www.netcom.com/~kvick/main.html. Please feel free to visit or email me

If you work with vacuum systems, DON'T LOAN THIS ONE!

By A Customer - May 9, 1997

John f. O'Hanlon is so thorough,
and has so much to offer. Whether the reader is
an engineer or an operator of a vacuum system
there is plenty here for each.
This is a reference book, so never lend it to anyone!

AVAILABILITY
Merchant	Format	Price
Amazon US	Paperback	$106.77 - $162.00
eBooks.com	Digital (PDF)	$162.00
BookByte	Paperback	$167.05
eCampus	Paperback	~~$161.20~~ discount!